Investigation on RF Mems Switches: Designs, Fabrications and Measurements
Keywords:
RF MEMS, Semiconductor, MICsAbstract
The motivation for using radio frequency microelectromechanical systems (RF MEMS) technology for the control of microwave circuits and antennas is presented in this paper. A brief survey of currently used microelectronic RF switching technologies is presented. This is followed by an introduction to the fundamental characteristics of RF MEMS switches. The inherent advantages of these switches relative to semiconductor switches are discussed. Microwave circuit and system applications that could benefit from the use of RF MEMS switches are listed.
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References
Young, R.J.R.a.W.C., Formulas for Stress and Strain. 6th edition, New York: McGraw-Hill, 1989.
J.W. Weaver, S.P.T., and D.H. Young, Vibration Problems in Engineering.5th edition, New York: Wiley, 1990.
Muldavin, J.B. and G.M. Rebeiz. Nonlinear electro-mechanical modeling of MEMS switches. in 2001 IEEE MTT-S International Microwave Sympsoium Digest. 2001.
Rebeiz, G.M. and J.B. Muldavin, RF MEMS switches and switch circuits. IEEE Microwave Magazine, 2001. 2(4): p. 59-71.
Petersen, K.E., Micromechanical membrane switches on silicon. IBM Journal of Research and Development, 1979. 23(4): p. 376-85.
Yao, Z.J., et al. Micromachined rf signal switching devices on high resistivity silicon substrates. in The 1997 ASME International Mechanical EngineeringCongress and Exposition Proceedings of Symposium on Micro-mechanical Systems. 1997.
Hyman, D., et al., Surface-micromachined RF MEMS switches on GaAs substrates. International Journal of RF and Microwave Computer-AidedEngineering, 1999. 9(4): p. 348-61.
Katehi, L.P.B. Si-based RF MEMS and micromachined circuits for wireless communications systems. in 2000 Topical Meetings on Silicon Monolithic Integrated Circuits in RF Systems. 2000.
Goldsmith, C., et al. Micromechanical membrane switches for microwave applications. in 1995 IEEE MTT-S International Microwave Symposium Digest. 1995.
Goldsmith, C., et al. Characteristics of micromachined switches at microwave frequencies. in 1996 IEEE MTT-S International Microwave Symposium Digest. 1996.
Liu, Y., RF MEMS Switches for Reconfigurable Antenna Systems. Final report to DARPA Toyon contract, 2001.
Pacheco, S.P., L.P.B. Katehi, and C.T.C. Nguyen. Design of low actuation voltage RF MEMS switch. in 2000 IEEE MTT-S International Microwave Symposium Digest. 2000.
Shyf-Chiang, S., D. Caruth, and M. Feng. Broadband low actuation voltage RF MEM switches. in IEEE Gallium Arsenide Integrated Circuits Symposium. 22nd Annual Technical Digest 2000. 2000.
Park, J.Y., et al. Fully integrated micromachined capacitive switches for RF applications. in 2000 IEEE MTT-S International Microwave Symposium Digest. 2000.
Raytheon, Workshop on advances in MEMS: Circuits, reliability and packaging. presented at the IEEE MTT Symposium, Phoenix, AZ, 2001.
Pacheco, S., C.T. Nguyen, and L.P.B. Katehi. Micromechanical electrostatic K-band switches. in 1998 IEEE MTT-S International Microwave Symposium Digest. 1998.
Muldavin, J.B. and G.M. Rebeiz. High-isolation inductively-tuned X-band MEMS shunt switches. in 2000 IEEE MTT-S International Microwave Symposium Digest. 2000.
Rizk, J., et al., High-isolation W-band MEMS switches. IEEE Microwave and Wireless Components Letters, 2001. 11(1): p. 10-12.
Muldavin, J.B. and G.M. Rebeiz, High-isolation CPW MEMS shunt switches. 1. Modeling. IEEE Transactions on Microwave Theory and Techniques, 2000. 48(6): p. 1045-52.
Muldavin, J.B. and G.M. Rebeiz, High-isolation CPW MEMS shunt switches. 2. Design. IEEE Transactions on Microwave Theory and Techniques, 2000. 48(6): p. 1053-6.
Goldsmith, C., et al. Lifetime characterization of capacitive RF MEMS switches. in 2001 IEEE MTT-S International Microwave Sympsoium Digest.2001.
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